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Seminar on conformal coating on high aspect ratio 3D-structures - 10 February 2017

Seminar on conformal coating on high aspect ratio 3D-structures - 10 February 2017

Feb 10, 2017 13.30 uur - 18.00 uur

imec, Kapeldreef 75, B-3001 Heverlee


Prof. dr. An HARDY



Are you into

Gasification, heterogeneous catalysis, drug delivery regulating tissue, injection mould coating, powder coating, flexible sensors, fuel cells, electrolysis, biomedical implants, (meso)porous membranes, adsorption, electrodes, microfluidics, scaffolds, catalysts, microelectronics, 3D printing, filtration, batteries, fibrous materials,

or in any other business where thin films on porous or challenging high aspect ratio structures are of key importance?

Then you absolutely should attend this event!

We’ll share our tips and tricks on how to reach conformality for various thin film deposition technologies, both in vacuum and at atmospheric conditions. We’ll shed light on the parameters that govern the deposition speed, the accessible degree of conformality; on the solvents, carrier gases, additives to use; and so on ...
You’ll take home a toolbox to develop your own conformal deposition processes, with our help if needed.

The technologies we’ll cover are:

  • Atomic & Molecular Layer Deposition (ALD & MLD); ALD is the champion in conformal deposition of very thin (nm-range) layers, whereby a thin film is deposited (atomic) layer by layer. MLD is a rather recent ALD flavour in which the thin film is built up with larger molecular fragments.
  • ElectroChemical Deposition (ECD) in aqueous solutions exploits self-limiting reactions to reach conformality
  • Chemical Solution Deposition (CSD) is driven to its extreme performance by spraying mist and substrate heating

Grab the occasion to discuss with experts from KU Leuven, UHasselt, UGent and imec, and with like-minded colleagues on the 10th of February.


13:30 Registration & welcome coffee
14:00 Introduction to conformal thin film deposition

Chemical solution deposition onto high aspect ratio 3D structures: engineering precursors and ultrasonic spraycoating.

An Hardy, UHasselt -  Institute for Materials Research and imec division imomec

15:05 BREAK

ElectroChemical Deposition, self-limiting reactions for conformality

Philippe Vereecken, imec

16:10 BREAK

Atomic & Molecular Layer Deposition 2 flavours of a sequential CVD process

Christophe Detavernier, Universiteit Gent

17:15 Networking drink

the organising committee:

Marlies Van Bael, An Hardy, IMO-IMOMEC, UHasselt
Philippe Vereecken, Carolien Martens, Bart Onsia, imec
Christophe Detavernier, UGent
Jan Fransaer, KU Leuven
Peter Notten, TU Eindhoven

This event disseminates results obtained through the SBO-project SoS-Lion (Solid-state Lithium-ion batteries for macro- and micro-battery applications) which was funded by IWT and FWO.