Logo UHasselt

menu

IMO - IMOMEC


Services

IMO - IMOMEC

Logo UHasselt Universiteit Hasselt - Knowledge in action

SCANNING ELECTRON MICROSCOPY - EDX - EBSD

Detailed information can be found in the brochure.

 

Scanning electron microscopy (SEM) is one of the most used characterising tools within material research because for a whole range of different industrial/research sectors information can be obtained from macro down to nano scale. During a SEM study a focused electron beam is scanned upon the surface of the material under study and generates different signals (SE, BSE, X-rays, light,…) which can be picked up by different detectors to build images, maps and/or spectra.

Nowadays a variety of detectors are available to obtain besides the classical imaging modes (SE : Secondary Electrons and BSE : Back Scattering Electrons) also a lot of information about the chemical composition (EDX : Energy Dispersive X-ray detection), the crystal structure (EBSD : Electron BackScatter Diffraction), the presence of defects / dopants (CL : CathodoLuminescence; EBIC : Electron Beam Induced Current),…. The lateral resolution of the SEM technique in imaging mode can be in the order of 1 nm in SE mode. Due to its versatility, SEM can be used in many research domains (materials science, chemistry, pharmacy, biology, geology…).

Typical examples include inspection of microelectronic devices at the surface and in cross-section; evaluation of coatings, corrosion study; failure analysis; chemical analysis; first check of RoHS compliancy of materials,…